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Step 1 of 4

Configure VarioS®-Microscanner

DIL14-Package MEMS-Scanner 3Types 2D-Mirror LDC-Module

Currently no LDC-modules and modular or semicustomized fabrication available. Please ask for devices from stock or modular systems. >>

Select VarioS®-Microscanner type:

zoom 2D-Axis Names
1D-Microscanner
LDC-Option
(1D laser deflection cube, sealed housing, sensor and electronics)

2D-Microscanner

Enter design parameters :




First Axis :

Hz
±

Second Axis :
(slow scanning)

Hz
± °

Max. Dynamic Deformation info (default= 32nm RMS )

nm

The input is restricted according to the available design space. Further information on design space, design parameters and navigation within the design space are provided in the help section of this page.

For easy navigation the design space maps provide orientation:

Design Space 1D Design Space 2D

Simulationspunkt-Suche im Parameterraum mit :

freqm = 0 | freqmf = -
amplm = 0 | amplmf = -
dia_m = 0 | dia_mf = -
index_m = [0 ; 0] | index_mf = [0 ; 0]
fΔgrid_m = 0 | fΔgrid_mf = 0
λ/20 = 32nm RMS (bei verteilten Federn 640nm )
fix: SOI-thickness = 75 µm
fix: pressure = 100 000 Pa
oscil.
frequency [Hz]
Ø
[µm]
Θmech
[°]
Θstab
[°]
Θ def RMS
[°]
Uan
[V/°]
Ustab
[V]
τmax
[GPa]
Index
X →
Index
Y ↓
Dist.
00 - - - - - - 000
Sim.punkt Spiegel→kein F_lower gefunden !
00 - - - - - - 000
Sim.punkt Spiegel→kein F_higher gefunden !
Sim.punkt Spiegel→kein D_lower gefunden !
Sim.punkt Spiegel→kein D_higher gefunden !
Spiegelumgebung→[0;0] [0;0] [0;0]
Spiegel→ Ampl.erreicht mit Θ=0
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last modified : 2019-06-26
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