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3 of many different types

to the Fraunhofer IPMS Scanner-Configurator !

The VarioS®-Microscanner-configurator may be used to easily configure microscanner-demonstrators, with individual properties from a defined design space, based on the VarioS®-Microscanner-construction-kit. According to verified results, demonstrators may be chosen from over 150 fabricated designs or be fabricated with a modular or semicustomized fabrication option. Finally a quotation for a chosen design can be requested from Fraunhofer IPMS.

Introduction to Fraunhofer IPMS VarioS®-Microscanners

VarioS in DIL Package Fraunhofer IPMS, as a German public research institute, has a long and successful track record of developing and fabricating highly miniaturized, resonantly operated MEMS-Scanners. These so-called microscanners feature large deflection angles and low power consumption. 1D and 2D scanning devices are built from single crystalline silicon with a qualified, fully CMOS compatible bulk micromachining process. ...  >>

Fraunhofer IPMS microscanners are suitable for a broad range of applications, are very reliable, robust, and even withstand accelerations of more than 2500 g. With more than 150 fabricated designs Fraunhofer IPMS possesses extensive experience in fabricating microscanners.

Fraunhofer IPMS is dedicated to transferring knowledge from research and development to industrial and consumer applications. Fraunhofer IPMS enables its customers to enter the market on time.Typical entrance barriers for microscanner-based applications as high cost and long lead times to obtain a demonstrator can be omitted by using the VarioS®-System.


LDC-Module The LDC (laser deflection cube) is a supplement for VarioS®-Microscanners that consists of a complete dust-proof chip-housing with an anti-reflective glass dome as optical interface, backside optical position detection, an electronic driving board and a software user interface.

Additional Fraunhofer IPMS Services

Wafer Fraunhofer IPMS offers various scientific, engineering and technological services from the field of optics, microtechnology and system design. For additional information on our MOEMS and microscanner capabilities please consult the Fraunhofer IPMS website or contact members of our scientific staff using the customer service email form.

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last modified : 2020-07-29